Operational Stabilization of Industrial Trichlorosilane Rectification: A Composite Stability Index Framework
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Filtvedt W.O., Javidi M., Holt A., Melaaen M.C., Marstein E., Tathgar H., Ramachandran P.A. Development of fluidized bed reactors for silicon production. Solar Energy Materials and Solar Cells. 2010. Vol. 94, No. 12. P. 1980–1995. DOI: 10.1016/j.solmat.2010.07.027
Braga A.F.B., Moreira S.P., Zampieri P.R., Bacchin J.M.G., Mei P.R. New processes for the production of solar-grade polycrystalline silicon: A review. Solar Energy Materials and Solar Cells. 2008. Vol. 92, No. 4. P. 418–424. DOI: 10.1016/j.solmat.2007.10.003.
del Coso G., del Cañizo C., Luque A. Chemical vapor deposition model of polysilicon in a trichlorosilane and hydrogen system. Journal of The Electrochemical Society. 2008. Vol. 155, No. 6. P. D485–D491. DOI: 10.1149/1.2902338.
Pizzini S. Towards solar grade silicon: Challenges and benefits for low cost photovoltaics. Solar Energy Materials and Solar Cells. 2010. Vol. 94, No. 9. P. 1528–1533. DOI: 10.1016/j.solmat.2010.01.016.
Ramos A., Filtvedt W.O., Lindholm D., Ramachandran P.A., Rodríguez A., del Cañizo C. Deposition reactors for solar grade silicon: A comparative thermal analysis of a Siemens reactor and a fluidized bed reactor. Journal of Crystal Growth. 2015. Vol. 431. P. 1–9. DOI: 10.1016/j.jcrysgro.2015.08.023.
Yasuda K., Okabe T.H. Solar-grade silicon production by metallothermic reduction. JOM. 2010. Vol. 62, No. 12. P. 94–101. DOI: 10.1007/s11837-010-0190-8.
Kister H.Z. Distillation Design. New York: McGraw-Hill, 1992. 710 p. ISBN: 978-0-07-034909-4. URL: https://books.google.com/books?id=0M1TAAAAMAAJ
Kister H.Z. Distillation Operation. New York: McGraw-Hill, 1990. 729 p. ISBN: 978-0-07-034910-0. URL: https://books.google.com/books?id=XG4MCrEBEB8C
Seader J.D., Henley E.J., Roper D.K. Separation Process Principles: Chemical and Biochemical Operations. 3rd ed. Hoboken, NJ: Wiley, 2011. 821 p. ISBN: 978-0-470-48183-7.
Doherty M.F., Malone M.F. Conceptual Design of Distillation Systems. New York: McGraw-Hill, 2001. 568 p. ISBN: 978-0-07-248863-0. URL: https://books.google.com/books?id=pYYvAQAAIAAJ
Skogestad S. Dynamics and control of distillation columns: A tutorial introduction. Chemical Engineering Research and Design. 1997. Vol. 75, No. 6. P. 539–562. DOI: 10.1205/026387697524092.
Yuan X., Guo L., Lv Q., Zhao D., Liao H., Ma W., Jiang Q., Xie G., Hou Y., Shen J. Product quality research in the industrialized preparation of electronic grade polysilicon: A review of impurity sources and control strategies. Renewable and Sustainable Energy Reviews. 2025. Vol. 214. Article 115569. DOI: 10.1016/j.rser.2025.115569.
Weidhaus D., Schindlbeck E., Hesse K. Trichlorosilane based silicon feedstock for the photovoltaic industry. In: Silicon for the Chemical Industry VII. Norway, 2004. P. 189–200.
Hesse K., Schindlbeck E., Dornberger E., Fischer M. Status and development of solar-grade silicon feedstock. In: Proceedings of the 24th European Photovoltaic Solar Energy Conference. Hamburg, Germany, 2009. P. 883–885. DOI: 10.4229/24thEUPVSEC2009-2DP.2.1.
SEMI M16-1110. Specification for Polycrystalline Silicon. Milpitas, CA: SEMI International Standards, 2010. URL: https://store-us.semi.org/products/m01600-semi-m16-specification-for-polycrystalline-silicon
CHIPS and Science Act of 2022. Public Law No. 117-167, 136 Stat. 1366. Enacted August 9, 2022. URL: https://www.congress.gov/bill/117th-congress/house-bill/4346.
Congressional Research Service. Semiconductors and the CHIPS Act: The Global Context. CRS Report R47558. Washington, DC: Congressional Research Service, 2023. URL: https://www.congress.gov/crs-product/R47558
Montgomery D.C. Introduction to Statistical Quality Control. 8th ed. Hoboken, NJ: Wiley, 2019. 768 p. ISBN: 978-1-119-39930-8.
Antony J. Six Sigma for service processes. Business Process Management Journal. 2006. Vol. 12, No. 2. P. 234–248. DOI: 10.1108/14637150610657558.
Shewhart W.A. Economic Control of Quality of Manufactured Product. New York: D. Van Nostrand Company, 1931. 501 p. URL: https://books.google.com/books?id=0o_9ldNiQowC.